Find mems bandwidth in network....

Sensing and actuating are achieved by means of capacitive transducers. The interest of such a system for filtering applications is that mechanical oscillating structures have a much higher quality factor than their electrical LC counterparts. After it was shown that filtering is possible with a singleoscillator system, numerous studies have been carried out in order to develop high-order filter architectures meeting specifications of real telecommunication systems. To design such filters, the mechanical oscillating structure is decomposed into elementary linear mechanical elements with lumped parameters, and their equivalent electrical models are built. After that the existing design method for coupled-resonators electrical passive filters is applied to calculate the element